A linear transport system for vacuum applications, based on linear motor technology, allows for fast, flexible, continuous and thus cheap production for optical, display and photovoltaic industries.

A linear transport system for vacuum applications, based on linear motor technology, allows for fast, flexible, continuous and thus cheap production for optical, display and photovoltaic industries. Nyquist Industrial Control from Eindhoven, The Netherlands, in collaboration with OTB Engineering from Eindhoven, developed a linear transport system for vacuum applications, based on linear motor technology. This system is a revolution in vacuum transport.

Vacuum transport is needed for a wide range of in-line production processes, e.g PECVD for solar cells and displays.

The benefit of this in-line system is that it allows for fast, flexible, continuous and thus cheap production.

OTB is specialised in the developing and constructing of in-line production systems for the optical, display and photovoltaic industries, amongst others, and for these it developed the LMS (Linear Motor System).

OTB wanted to only place the moving parts necessary for product conveying inside the vacuum, so that all electronics are outside of the vacuum and are not in motion.

Thus, mechanical lead-throughs are no longer necessary.

For the development of the Motion concept OTB called in Nyquist Industrial Control.

The Nyquist solution for this in-line vacuum process is based on the standard NYCe Motion Control products.

The carriers within the system move through the vacuum and in doing so will pass various intelligent coils outside of the vacuum.

This concept requires an exchange of sensor data and a specific synchronisation between setpoint generators of the different coils.

Thus an integrated operating system arises, consisting of 28 actuators.

It is important for the speed and accuracy to be monitored so that the system fulfils all requirements as to the processes that are implemented.

Advanced parts have been applied for instance to prevent collisions from happening.

At the same time it has been made possible to create a train of carriers.

The LMS, which is part of the DEPx platform, allows OTB clients to combine various technologies such as PECVD, PVD and CVD in one and the same machine.

This process is unique in that the carriers are all individually controlled.

As a result of this individual control it is capable of combining both incremental and continuous processes in one machine.

Thus, the carriers can also be used as load lock of the vacuum system.

End-user benefits of the in-line vacuum transport include lower Total Costs of Ownership, modularity and system continuity.

During the processes the product will remain inside of the vacuum so that there will be less soiling.

By combining various processes in one and the same machine less space and fewer operators are needed.